Metódy prípravy nanoštruktúr I

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Author:Vladimír Komanický
Year of publication:2022
Available from:07.04.2022
Edition:1st edition
Document type:Academic textbook - scripts
Publication language:Slovak
Number of pages:83
Faculty:Faculty of Science
Licencia:Creative Commons BY NC ND (Uveďte autora - Nepoužívajte komerčne - Nespracovávajte)

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The aim of this textbook is to acquaint students in physics, chemistry and material science on both undergraduate and graduate level, with the techniques used to prepare micro-electromechanical devices, nanoobjects and nanostructures using the so called top down methodologies. The is no requirement for this course to pass any prior courses. The introduction part of the text defines the forces that affect nanoobjects and the interactions between them. Reader can understand in detail why properties of nanomaterials and nanostructures are so different when comprared to their macroscopic counterparts. Text gives also an overview of thin film preparation technologies as precursors for the preparation of nanostructures. The main emphasis in Volume I is on conventional lithographic technologies for the preparation and shaping of nanostructures, methods for characterization of thin films, nanoparticles and nanomaterials. Unconventional lithographic methods will also be discussed in the prepared upcoming Volume II. Student will also get acquainted with the applications of nanostructures in research focused on nanophysics, nanocatalysis and nanoelectronics. The textbook is used as a study material for the course ÚFV / MPN / 14 - Methods of preparation and characterization of nanostructures. Part of the course is also a laboratory exercise in which the student gets acquainted with the techiques used for the preparation and characterization of thin films and top-down technologies used for the preparation of nanostructures.

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